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Home / News

Hwatsing: China’s CMP tech propeller

Updated: 2016-07-01 (chinadaily.com.cn)
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Hwatsing: China’s CMP tech propeller

workshop of Hwatsing[Photo by Sun Muyao/chinadaily.com.cn]

As the only company in China capable of developing 12 inch (300mm) copper polishing equipment and the owner of several patented technologies, Tianjin Hwatsing Technology Company Limited (referred to as Hwatsing) enjoys a formidable reputation in the field of chemical-mechanical planarization (CMP) research and development and the industrialization of the equipment manufacturing.

According to a principal of Hwatsing, the company was established in 2013 and is a high-tech enterprise jointly invested by the Tianjin Government and Tsinghua University. Located in the Haihe Technological Zone, Jinnan District in Tianjin, the company is responsible for promoting cooperative relationships between Beijing and Tianjin.

The team consists of members from top research institutions such as Tsinghua University and has obtained several internationally acknowledged certificates, including SEMI S2, SEMI F47 and ISO9001.

The CMP technology, one of the five crucial gordian techniques in IC fabrication process, has been developed by Tsinghua University into the 12-inch copper polishing equipment. It is Hwasting’s mission to commercialize the research findings by putting them on an industrial production line.

In recent years, Hwasting has increased its pace in its industrialization of products by constantly releasing new ones, including: the Universal-300 (the 12 inch copper polishing equipment), the Universal-150 (a small-size device), the Universal-150 Cluster (a polishing and cleaning machine), and the Universal-300 Plus (an updated version). In 2015, six inventions and one utility model received patents.

The quick development of Hwasting is closely related to strong support system, particularly in its finances, by the Tianjin municipal government, Lu Xinchun, chairman of the company, said.

Hwasting pays special attention to its talent structure by hiring a group of employers with high academic degree. Now, 17 percent of its research and development team members are doctors and 57 percent postgraduates, according to Lu.

Hwasting will keep on its close interactions and cooperation with Tsinghua University and IC manufacturing companies to make CMP technologies and home-made CMP equipment available to the Chinese public.

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